California Semiconductor Equipment Expert
UA Associates
Dr. Larry Hartsough has thirty years experience in the semiconductor capital equipment industry in the areas of thin film deposition, equipment design and plasma processing of materials. He was a pioneer in the development of magnetron sputtering hardware and processes for the metallization of silicon integrated circuits. Dr. Hartsough has been instrumental in the development of cluster tool and 300mm interface standards for semiconductor fabrication equipment.
Areas of Expertise:
- Semiconductor manufacturing equipment
- Physical metallurgy
- Thin film properties
- Thin film failure analysis
- Planar and hollow-cathode magnetron sputter source design
- SEMI Standards development and compliance
- Vacuum system design & practice
- Cluster tool design and interfaces
- PVD thin film process
- PVD process control
- Electrostatic chuck technology
- Magnetic modeling
- Ion source technologies
- Arc suppression
- Deposition shielding design
- Engineering management
- High voltage isolation
- Materials Science
- Process development (PVD)
- Project/program management
- Ultra-high vacuum materials and techniques
Visit: http://semiconductorexpert.leadingexperts.com
Additional Questions or need further information?
Larry Hartsough
UA Associates
3007 Benvenue Ave.
Berkeley, CA 94705
Phone: (510)548-5027
Fax: (510)548-8109